In this study, we designed and fabricated the X-cut single-crystal lithium niobate (LiNbO3 or LN) piezoelectric micromachined ultrasonic transducer (PMUT) with a lateral-field-excitation (LFE) ...

These transducers are key to robotic and manufacturing precision, and any automation systems in which precise positioning sensing for motion control are demanded. Piezoelectric transducers generate an ...

Persistent Link: https://ieeexplore.ieee.org/servlet/opac?punumber=68 ...