It is a cyclic process that relies on self-limiting chemical reactions to achieve precise ... faster ALE processes that can maintain the atomic-level precision while increasing the etching rate.
"This level of precision is typically only possible ... The effects of sub-monolayer laser etching on the chemical and electrical properties of the (100) diamond surface, Applied Surface Science ...
The process modules provide high precision, high throughput ... refractive index, stress, and wet chemical etch rate.
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