An example of directional etching for nanohole arrays of less than 500nm in diameter. (Image: A*STAR Institute of Materials Research and Engineering) Wet etching can be classified into two main types ...

It is a cyclic process that relies on self-limiting chemical reactions to achieve precise material removal with ... Researchers are working on developing faster ALE processes that can maintain the ...

Description: JST's Single Wafer Etching and Stripping System utilizes an automated chemical spray process on a single wafer. The system includes oscillating spray nozzles, adjustable wafer speed (RPM) ...

Following trend towards miniaturization, IC manufacturers are under constant pressure to increase the density of ...

A new technical titled “The effects of sub-monolayer laser etching on the chemical and electrical properties of the (100 ... surface with pulsed UV light at fluences below the ablation threshold ...