He recently worked out a relatively inexpensive and easy way to etch metals using some chemistry skill and a little bit of electricity. After preparing a set of stencils and cleaning the metal ...

Plasma chemistry plays a crucial role in the semiconductor fabrication process, particularly in etching, which is essential for creating intricate patterns on silicon wafers. Recent research has ...

Atomic layer etching (ALE) is the reverse of atomic layer deposition (ALD). ALE can be achieved using sequential, self-limiting thermal reactions. We have recently demonstrated Al 2 O 3 ALE [1-3] and ...

The chapter discusses the etching rate, III–V materials, and metal etch. In addition to the different etching rates of different ... Although RIE and PECVD equipment are similar in that they both ...